Ars Technica traces the origin of the first-person shooter back to 1973, and touches on dozens of games' contributions to the genre up to the present day. There are screenshots and mentions of more obscure titles in addition to all the obvious suspects. If you're an FPS fan, a lot of the article will be old hat, but you'll probably see something you'll want to learn more about.
The author is a Mac gamer from back in the day, and Pathways and Marathon get a couple paragraphs each. The article even links to the Story page to illustrate the lure of Marathon's cryptic terminals.